JPS63165761U - - Google Patents

Info

Publication number
JPS63165761U
JPS63165761U JP1987058351U JP5835187U JPS63165761U JP S63165761 U JPS63165761 U JP S63165761U JP 1987058351 U JP1987058351 U JP 1987058351U JP 5835187 U JP5835187 U JP 5835187U JP S63165761 U JPS63165761 U JP S63165761U
Authority
JP
Japan
Prior art keywords
sample
detector
tilting
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987058351U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530279Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987058351U priority Critical patent/JPH0530279Y2/ja
Priority to US07/181,201 priority patent/US4818874A/en
Publication of JPS63165761U publication Critical patent/JPS63165761U/ja
Application granted granted Critical
Publication of JPH0530279Y2 publication Critical patent/JPH0530279Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1987058351U 1987-04-17 1987-04-17 Expired - Lifetime JPH0530279Y2 (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1987058351U JPH0530279Y2 (en]) 1987-04-17 1987-04-17
US07/181,201 US4818874A (en) 1987-04-17 1988-04-13 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987058351U JPH0530279Y2 (en]) 1987-04-17 1987-04-17

Publications (2)

Publication Number Publication Date
JPS63165761U true JPS63165761U (en]) 1988-10-28
JPH0530279Y2 JPH0530279Y2 (en]) 1993-08-03

Family

ID=13081897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987058351U Expired - Lifetime JPH0530279Y2 (en]) 1987-04-17 1987-04-17

Country Status (2)

Country Link
US (1) US4818874A (en])
JP (1) JPH0530279Y2 (en])

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH077654B2 (ja) * 1988-04-01 1995-01-30 株式会社日立製作所 走査型電子顕微鏡
JP2786207B2 (ja) * 1988-08-26 1998-08-13 株式会社日立製作所 走査型顕微鏡における表面形状算出方法
JP3133307B2 (ja) * 1989-10-13 2001-02-05 株式会社日立製作所 電子顕微鏡
US5097127A (en) * 1990-02-23 1992-03-17 Ibm Corporation Multiple detector system for specimen inspection using high energy backscatter electrons
US5586321A (en) * 1995-02-21 1996-12-17 Ramot Ltd. Diffracting token router and applications thereof
JP2003331770A (ja) * 2002-05-15 2003-11-21 Seiko Instruments Inc 電子線装置
US6930308B1 (en) * 2002-07-11 2005-08-16 Kla-Tencor Technologies Corporation SEM profile and surface reconstruction using multiple data sets
US7872236B2 (en) * 2007-01-30 2011-01-18 Hermes Microvision, Inc. Charged particle detection devices
US7960697B2 (en) * 2008-10-23 2011-06-14 Hermes-Microvision, Inc. Electron beam apparatus
US7919760B2 (en) * 2008-12-09 2011-04-05 Hermes-Microvision, Inc. Operation stage for wafer edge inspection and review
US8094924B2 (en) * 2008-12-15 2012-01-10 Hermes-Microvision, Inc. E-beam defect review system
JP2012138324A (ja) * 2010-12-28 2012-07-19 Topcon Corp 二次電子検出器、及び荷電粒子ビーム装置
US10872744B2 (en) * 2016-06-17 2020-12-22 Hitachi High-Tech Corporation Charged particle beam apparatus
CZ309523B6 (cs) * 2020-08-27 2023-03-22 Tescan Brno, S.R.O. Naklápěcí prvek manipulačního stolku

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114269A (en) * 1980-02-15 1981-09-08 Internatl Precision Inc Scanning type electronic microscope
JPS573358A (en) * 1980-06-06 1982-01-08 Hitachi Ltd Detector for electron beam device
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device
JPS5835854A (ja) * 1981-08-28 1983-03-02 Hitachi Ltd 二次電子検出装置
JPS59165357A (ja) * 1983-03-09 1984-09-18 Hitachi Ltd 走査形電子顕微鏡の像形成方法
JPH063721B2 (ja) * 1985-05-17 1994-01-12 株式会社日立製作所 走査電子顕微鏡

Also Published As

Publication number Publication date
JPH0530279Y2 (en]) 1993-08-03
US4818874A (en) 1989-04-04

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